CVD/ALD technology plays very important roles in forming nano-meter thin film and filling deep and narrow hole evenly. Applications are expanding in electronic product producing process such as FPD, LED, PV, etc. CVD/ALD process vaporizes precursor substances and undergoes chemical reactions to form metal film, oxidized metal film, nitrified metal film, etc. Hansol Chemical is producing various silicon and metal spheres used in CVD/ALD